Arrangement and method for abating effluent from a process

Details Arrangement and method for abating effluent from a process Arrangement and method for abating effluent from a process

2001-08-29

2009-08-25

Zervigon, Rudy (Department: 1792)

Coating apparatus

Gas or vapor deposition

C096S064000, C096S152000, C096S139000, C096S232000, C096S239000, C096S302000, C096S304000, C096S305000, C096S320000, C095S149000, C156S345330

Reexamination Certificate

active

07578883

ABSTRACT:
An arrangement and associated method for abating effluent from an etching process is disclosed.

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