Arm apparatus for conveying semiconductor wafer and processing s

Details Arm apparatus for conveying semiconductor wafer and processing s Arm apparatus for conveying semiconductor wafer and processing s

1992-04-22

1993-08-17

Huppert, Michael S.

Material or article handling

Apparatus for charging a load holding or supporting element...

With simultaneous charging and discharging of plural load...

414680, 4147446, 901 30, 901 8, B65H 500

Patent

active

052362957

ABSTRACT:
A wafer boat has an upper projection, a lower projection, and a lower flange. A horizontal/vertical conversion handling apparatus for handling the wafer boat comprises a rotatable arm, and upper and lower hands provided at both ends of the arm. The arm is rotatable by at least 90.degree. in a vertical plane. The upper hand has boat contact portions for contact in horizontal and vertical modes, which are engaged with the upper projection on both sides thereof. The boat contact portions of the upper hand are vertically arranged such that the positions of the boat contact portions are reversed by the 180.degree. rotation of the upper hand. The lower hand has boat contact portions for contact in a horizontal mode, which are engaged with the lower projection on both sides thereof, and boat contact portions for contact in a vertical mode, which are engaged with the lower surface of the lower flange. The boat contact portions of the lower hand are vertically arranged, such that the positions of both the boat contact portions for contact in the horizontal mode and the boat contact portions for contact in the vertical mode are reversed by the 180.degree. rotation of the lower hand. The positions of the boat contact portions ar changed according to the steps to be performed, thereby preventing cross-contamination.

REFERENCES:
patent: 3675962 (1972-07-01), Simpson
patent: 3834213 (1974-09-01), Henzler et al.
patent: 4095832 (1978-06-01), Slinker
patent: 4416577 (1983-11-01), Inaba et al.
patent: 4648786 (1987-03-01), Sakurai
patent: 4938691 (1990-07-01), Ohkase et al.
patent: 4955775 (1990-09-01), Ohkase et al.

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