Arc-type evaporator

Details Arc-type evaporator Arc-type evaporator

1996-01-23

1998-12-01

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Vacuum arc discharge coating

20419238, C23C 1422

Patent

active

058432930

ABSTRACT:
The arc-type evaporator of the present invention includes an anode and a cathode for generating arc discharging, a trigger electrode and a gas supply pipe. The trigger electrode is contacted with the cathode to cause a first spark, and thereafter is separated from the cathode to occur the arc discharge between the anode and the cathode. The gas supply pipe is provided independently of the trigger electrode, and supplies the cathode a reactive gas which reacts with a substance forming the cathode to produce a chemical compound. The gas supply pipe includes a gas blow-out port formed in the neighborhood of the side portion or rear side portion of the cathode to face the cathode. The reactive gas is supplied from the gas blow-out port to an area including the front surface of the cathode.

REFERENCES:
patent: 3793179 (1974-02-01), Sablev et al.
patent: 3836451 (1974-09-01), Snaper
patent: 4556471 (1985-12-01), Bergman et al.
patent: 4724058 (1988-02-01), Morrison, Jr.
patent: 4929322 (1990-05-01), Sue et al.
patent: 5160595 (1992-11-01), Hauger et al.

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