Arc-magnetron and the method of coating

Details Arc-magnetron and the method of coating Arc-magnetron and the method of coating

1991-05-16

1992-11-03

Nguyen, Nam

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

20419212, 2042982, 20429841, 427580, C23C 1434

Patent

active

051605953

ABSTRACT:
An arc magnetron is described in which an edge magnet arrangement is displaceable in the axial direction relative to a preferably fixedly mounted center pole permanent magnet so that a cathode sputtering process and/or an arc discharge process can be realized in dependence on the relative position of the edge magnet arrangement and the center pole magnet.

REFERENCES:
patent: 3836451 (1974-09-01), Snaper
patent: 4309266 (1982-01-01), Nakamura et al.
patent: 4559125 (1985-12-01), Mularie
patent: 4724058 (1988-02-01), Morrison, Jr.
patent: 4734183 (1988-03-01), Wirz et al.
patent: 4927513 (1990-05-01), Schultheiss et al.
patent: 5022978 (1991-06-01), Hensel et al.

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