Arc ion plating system

Details Arc ion plating system Arc ion plating system

1993-05-24

1995-01-10

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Vacuum arc discharge coating

20429805, 20419238, 20429823, C23C 1422

Patent

active

053804201

ABSTRACT:
The present invention provides an arc ion plating system capable of easily moving a cathode and a workpiece in and out of a vacuum chamber for exchange, surface cleaning, and the like. A door is provided for opening/closing an opening portion provided on the vacuum chamber. A movable carrier that is movable in and out of the vacuum chamber through the opening portion is mounted. The cathode and the workpiece are provided on the movable carrier. The cathode and the workpiece that are mounted on the movable carrier are carried in and out of the vacuum chamber together with the movable carrier.

REFERENCES:
patent: 4448799 (1984-05-01), Bergmann et al.
patent: 4877505 (1989-10-01), Bergmann
patent: 4894133 (1990-01-01), Hedgcoth
patent: 4975168 (1990-12-01), Ohno et al.
patent: 5026466 (1991-06-01), Wesemeyer et al.
patent: 5037522 (1991-08-01), Vergason
patent: 5103766 (1992-04-01), Yoshikawa et al.
patent: 5244554 (1993-09-01), Yamagata et al.

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