Arc evaporator with a powerful magnetic guide for targets...

Details Arc evaporator with a powerful magnetic guide for targets... Arc evaporator with a powerful magnetic guide for targets...

2006-06-23

2010-11-09

McDonald, Rodney G (Department: 1795)

Chemistry: electrical and wave energy

Apparatus

Vacuum arc discharge coating

C204S192380

Reexamination Certificate

active

07828946

ABSTRACT:
A magnetic guide is presented that controls an electric arc between an anode and a cathode, which may be a target, over the whole cathode surface. The magnetic guide may be included in an arc evaporator and may include a first magnetic system having a group of permanent magnets located on the periphery of the evaporator or target, so that magnetization is perpendicular to the surface of the target. The magnetic guide may also include a second magnetic system that includes an electromagnet located at the rear of the target housed in an electrically insulating body at a distance from the target, with at least one of its magnetic poles parallel to the surface of the target, so that the combined action of the two magnetic systems provides uniform use or consumption of the target.

REFERENCES:
patent: 4839011 (1989-06-01), Ramalingam et al.
patent: 4891560 (1990-01-01), Okumura et al.
patent: 5298136 (1994-03-01), Ramalingam
patent: 5421978 (1995-06-01), Schuhmacher et al.
patent: 6413387 (2002-07-01), Shi et al.
patent: 6440282 (2002-08-01), Wada et al.

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