Electric lamp or space discharge component or device manufacturi – Process – Electrode making
Patent
1996-10-04
1999-01-12
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
Electrode making
H01J 37317
Patent
active
058578897
ABSTRACT:
The present invention relates to the fabrication of materials and structures having selected mechanical, thermal and electrical properties. More particularly, the invention relates to the use of these materials and structures in ion implantation systems. Structures comprising boron material provide components for use in implanters including arc chambers with which a beam of ions is generated for implantation into a target such as a semiconductor wafer.
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Ramsey Kenneth J.
ThermoCeramix, LLC
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