Arbitrarily wide lens array with an image field to span the widt

Details Arbitrarily wide lens array with an image field to span the widt Arbitrarily wide lens array with an image field to span the widt

1995-02-15

1996-12-17

Epps, Georgia Y.

Optical: systems and elements

Lens

With reflecting element

G02B 1700

Patent

active

055859720

ABSTRACT:
A system to transfer a pattern from a reticle to a substrate using a lens array having an arbitrarily wide image field that spans the width of the substrate. The disclosed system incorporates multiple, Wynne Dyson lenses arranged in serial pairs and staggered in position so that each dual serial Wynne Dyson lens system transfers a portion of the overall image from the reticle to the substrate as each are transported past the array of lens pairs. To transfer a complete, unbroken pattern on the substrate, each of the dual serial Wynne Dyson lens pairs are positioned in opposing and side-by-side positions and are staggered with respect to the scan direction. Each lens pair optionally includes individual internal adjustments, so that the pattern produced on the substrate does not contain any breaks or discontinuities.

REFERENCES:
patent: 4953960 (1990-09-01), Williamson
patent: 5003345 (1991-05-01), Markle
patent: 5164794 (1992-11-01), Markle
patent: 5303001 (1994-04-01), Jeong
patent: 5393371 (1995-02-01), Chang
patent: 5402205 (1995-03-01), Markle

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