Aqueous zirconia sol and method of preparing same

Details Aqueous zirconia sol and method of preparing same Aqueous zirconia sol and method of preparing same

1995-06-02

1997-07-01

Lovering, Richard D.

Compositions

Preservative agents

Anti-corrosion

51309, 106 3827, 106450, 252314, B01J 1300

Patent

active

056434979

ABSTRACT:
A stable aqueous sol of colloidal zirconia having lowered surface activity and useful for polishing semiconductors and the like, is prepared by a process comprising calcining a colloidal zirconia having a specific surface area of 10 to 400 m.sup.2 /g, a particle size of 20 to 500 nm and a dehydratable water content of 4 to 15% by weight at 400.degree. to 1,000.degree. C. to form a calcined zirconia having a dehydratable water content of 0.1 to 2% by weight, and pulverizing the calcined zirconia in the presence of a water-soluble acid or alkali in water, to form the stable sol of colloidal zirconia having a specific surface area of 5 to 200 m.sup.2 /g, a particle size of 20 to 1,500 nm and a dehydratable water content of 0.1 to 3% by weight. The stable sol of colloidal zirconia has a ZrO.sub.2 concentration of 5 to 80% by weight.

REFERENCES:
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patent: 4242842 (1981-01-01), Yancey
patent: 5004711 (1991-04-01), Grodek
patent: 5037579 (1991-08-01), Matchett
patent: 5223176 (1993-06-01), Obitsu et al.

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