Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – Specific organic component
Reexamination Certificate
2005-09-13
2005-09-13
Kornakov, M. (Department: 1746)
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
Specific organic component
C510S175000, C510S176000, C510S461000, C510S492000, C510S493000
Reexamination Certificate
active
06943142
ABSTRACT:
The present invention relates to aqueous compositions used to remove post etch organic and inorganic residue as well polymeric residues and contaminants from semiconductor substrates. The compositions are comprised of a water soluble organic solvent, a sulfonic acid and water.
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Egbe Matthew I.
Peters Darryl W.
Air Products and Chemicals Inc.
Kornakov M.
Morris-Oskanian Rosaleen P.
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