Aqueous dispersion slurry of inorganic particles and production

Details Aqueous dispersion slurry of inorganic particles and production Aqueous dispersion slurry of inorganic particles and production

1998-08-18

2000-05-30

Brouillette, Gabrielle

Liquid purification or separation

Diverse distinct separators

Including a filter

210806, 306288, 516 81, 516 88, 516 90, 516 93, 501146, 209 5, B01D 2400, B01D 3700, C04B 3300, B03B 100

Patent

active

06068769&

ABSTRACT:
The present invention provides aqueous dispersion slurry of inorganic particles which is so stable as not to increase in viscosity, gel or sediment even if stored for a long time and therefore can be used as raw materials for, for example, cosmetics, paint, coating materials and lapping slurry for semiconductor wafers, and production method of such aqueous dispersion slurry. The aqueous dispersion slurry according to the present invention has the number of particles whose a particle diameter of 1.3 .mu.m or more is 180,000 or less per mL in terms of 30 wt % in concentration, and the average particle diameter thereof is in a range of 0.05-0.9 .mu.m. The number of particles having aparticle diameter of 1.3 .mu.m or more is counted by using Particle Sensor KS-60, which is a light extinction type sensor for detecting particles, and Particle Counter KL-11, which is a particle counter, both of which made by the same manufacturer, Rion Electro Corp. The average particle diameter is measured by using Laser Particle Analyzer System Par-III made by Otsuka Denshi Co., Ltd.

REFERENCES:
patent: 5114537 (1992-05-01), Scott et al.
patent: 5116535 (1992-05-01), Cochrane
patent: 5308508 (1994-05-01), Womack
patent: 5391258 (1995-02-01), Brancaleoni et al.
patent: 5417855 (1995-05-01), Gershenson
Catalog of Nippon Aerosil Co., Ltd., No. 19, pp. 38 and 39, "Technical Bulletin Aerosil" (1994).

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