Aqueous dispersion, process for its production and use

Details Aqueous dispersion, process for its production and use Aqueous dispersion, process for its production and use

2007-01-30

2007-01-30

Kopec, Mark (Department: 1751)

Compositions

Etching or brightening compositions

C252S079500, C106S003000, C106S287340, C106S442000, C106S447000, C106S482000, C106S489000, C438S691000, C438S693000, C423S335000, C428S403000, C428S404000, C051S307000, C516S086000, C516S093000, C501S128000

Reexamination Certificate

active

10078373

ABSTRACT:
Aqueous dispersion containing a silicon-aluminum mixed oxide powder, the powder containing 0.1 to 99.9 wt. % Al2O3and Si—O—Al-bonds. The dispersion can be produced using dispersing and/or grinding devices which a achieve an energy input of at least 200 KJ/m3. The dispersion can be used for the chemical-mechanical polishing of semiconductor substrates.

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Ullmann's Enz. tech. Chem., 4thEd., vol A23, pp. 694-696.

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