Aqueous developable poly(olefin sulfone) terpolymers

Details Aqueous developable poly(olefin sulfone) terpolymers Aqueous developable poly(olefin sulfone) terpolymers

1982-02-09

1983-07-12

Anderson, Harold D.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

At least one aryl ring which is part of a fused or bridged...

524366, 524599, 524609, 524845, 528364, C08G 7522

Patent

active

043931600

ABSTRACT:
This invention relates to novel terpolymers of 3-methylcyclopentene, 2-cyclopentene-1-acetic acid and sulfur dioxide. Positive electron beam resist media prepared from the subject terpolymers possesses excellent sensitivity and development latitude and unexpectedly are developable with conventional aqueous alkaline developers.

REFERENCES:
patent: 2899412 (1959-08-01), Caldwell et al.
patent: 3898350 (1975-08-01), Gipstein et al.
patent: 3935331 (1976-01-01), Poliniak et al.
patent: 3935332 (1976-01-01), Poliniak et al.
patent: 4065306 (1977-12-01), Ross et al.
patent: 4153741 (1979-05-01), Poliniak et al.
patent: 4194912 (1980-03-01), Davidson

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