Data processing: structural design – modeling – simulation – and em – Simulating electronic device or electrical system
Reexamination Certificate
2003-02-26
2009-12-08
Shah, Kamini S (Department: 2128)
Data processing: structural design, modeling, simulation, and em
Simulating electronic device or electrical system
Reexamination Certificate
active
07630873
ABSTRACT:
Eigensolutions for use in determining the profile of a structure formed on a semiconductor wafer can be approximated by obtaining a known set of eigenvectors associated with a first section of a hypothetical profile of the structure, where the known set of eigenvectors is used to generate a simulated diffraction signal for the hypothetical profile. A known characteristic matrix associated with a second section of a hypothetical profile is obtained, and an approximated set of eigenvalues for the second section is determined based on the known set of eigenvectors associated with the first section and the known characteristic matrix associated with the second section.
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Bischoff Joerg
Hehl Karl
Jin Wen
Niu Xinhui
Madriaga Manuel B.
Shah Kamini S
Silver David
Tokyo Electron Limited
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