Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-02-07
2009-12-29
Banks, Derris H (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S847000, C029S842000, C029S844000, C029S874000, C029S882000, C324S754090
Reexamination Certificate
active
07637007
ABSTRACT:
An approach for fabricating cantilever probes for a probe card assembly includes forming posts on conductive traces on a substrate. A beam panel having beam elements formed therein is aligned to the substrate so that the beam elements are in contact with the plurality of posts. Each beam element is in contact with a post at a portion of the beam element so that both a first end portion and a second end portion overhang the post element. Each beam element is also attached to the beam panel by the first end portion. The beam elements are bonded to the plurality of posts. The first end portion of each beam element is cut, for example using an electrode, laser ablation or by dicing, to release the beam element from the beam panel. The beam panel is then removed, leaving the beam elements attached to the posts.
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Clauberg Horst
Cunningham Mark
McGlory John
Theppakuttai Senthil
Tunaboylu Bahadir
Banks Derris H
Hickman Palermo & Truong & Becker LLP
Le Dan D
SV Probe Pte. Ltd.
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