Appratus for measuring the profile of an aspherical surface

Details Appratus for measuring the profile of an aspherical surface Appratus for measuring the profile of an aspherical surface

1987-08-13

1989-12-12

Willis, Davis L.

Optics: measuring and testing

By particle light scattering

With photocell detection

356360, G01B 902

Patent

active

048863629

ABSTRACT:
An apparatus for measuring the profile of an aspherical surface in which two coherent optical beams of closely spaced frequencies are produced. One of the beams is reflected from either an optical probe or a mechanical feeler probe coupled with the turning aspherical surface. The reflected and non-reflected beams interfere and the resultant beat signal is detected and its frequency change measured to determine the differing optical path length to the turning aspherical surface. The mechanical probe has a feeler biased into contact with the aspherical surface and a reflector fixed thereto for reflecting the one beam. The optical probe has an auto-focusing objective lens for focusing the one beam to be reflected from the turning asperical surface.

REFERENCES:
patent: 4576479 (1986-03-01), Downs
patent: 4611916 (1986-09-01), Yoshizami
patent: 4714346 (1987-12-01), Eichen et al.

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