Electric heating – Metal heating – By arc
Reexamination Certificate
2006-09-29
2011-11-08
Paschall, Mark (Department: 3742)
Electric heating
Metal heating
By arc
C219S121480, C219S121430, C219S121510, C118S7230IR
Reexamination Certificate
active
08053700
ABSTRACT:
An improved plasma vessel (i.e., plasma applicator) that provides effective cooling includes a plurality of generally linear tubes having a dielectric interior fluidly connected together by dielectric connectors. The tubes and connectors are joined together to form a leak-tight plasma vessel. A cooling system surrounding the improved plasma vessel includes a rigid cooling plate and a deformable thermal transfer material disposed between the plasma vessel and the cooling plate. After use or at an operator's discretion, the plasma vessel can be removed from the cooling system and a new vessel may be inserted in its place. Alternatively, the used vessel may be refurbished and re-inserted into the cooling system. The new or refurbished vessel may or may not be of the same size or configuration as the used vessel. Thermal contact between the cooling system and the new or refurbished vessel, however is maintained through the deformable thermal transfer material.
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Chen Xing
Schuss Jack J.
MKS Instruments Inc.
Paschall Mark
Proskauer Rose LLP
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