Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1996-10-17
1998-11-17
Kincaid, Kristine L.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
361322, 257530, 257532, H01G 406
Patent
active
058385304
ABSTRACT:
It is beneficial for an FPGA, PROM, DRAM and superconductive circuit to use a protective ceramic as its insulating material. This protective ceramic can densely cover metal surface and is free of defects. As a result, a high yield can be ensured. The Pilling-Bedworth ratio is a good indicator of the protective nature of an insulating material. It is desirable to limit the Pilling-Bedworth ratio larger than 1 and preferably smaller than 2. Multiple layers of ceramics can be used to further reduce the defect density and improve yield.
REFERENCES:
patent: 4200474 (1980-04-01), Morris
patent: 4288470 (1981-09-01), Bate et al.
patent: 4333808 (1982-06-01), Bhattacharyya et al.
patent: 4432035 (1984-02-01), Hsieh et al.
patent: 4495219 (1985-01-01), Kato et al.
patent: 4589056 (1986-05-01), Stimmell
patent: 4742025 (1988-05-01), Ohyu et al.
patent: 4899205 (1990-02-01), Hamdy
patent: 4937650 (1990-06-01), Shinriki et al.
patent: 5061971 (1991-10-01), Takemura
patent: 5070384 (1991-12-01), McCollum et al.
patent: 5079191 (1992-01-01), Shinriki et al.
patent: 5111355 (1992-05-01), Anand et al.
patent: 5142438 (1992-08-01), Reinberg et al.
patent: 5266829 (1993-11-01), Hamdy et al.
patent: 5373169 (1994-12-01), McCollum et al.
patent: 5374832 (1994-12-01), Tung et al.
patent: 5412244 (1995-05-01), Hamdy et al.
patent: 5432732 (1995-07-01), Ohmi
patent: 5439840 (1995-08-01), Jones et al.
patent: 5444006 (1995-08-01), Han et al.
patent: 5463244 (1995-10-01), De Araujo et al.
patent: 5482884 (1996-01-01), McCollum et al.
patent: 5521423 (1996-05-01), Shinriki et al.
patent: 5552337 (1996-09-01), Kwon et al.
patent: 5552627 (1996-09-01), McCollum et al.
patent: 5569619 (1996-10-01), Roh
E.Irene, "Silicon oxidation studies: some aspects of the initial oxidation regime",Journal of Electrochemical Society, vol. 125, No. 10,pp. 1708-1714, Oct. 1978.
J. Gibson et al. "Direct evidence for 1nm pores in dry thermal SiO2 from high resolution transmission electron microscopy",Journal of Electrochemical Society, vol. 127, pp. 2722-2728, Dec. 1980.
J.Lee et al. "Comparison between CVD and thermal oxide dielectric integrity",IEEE Electron Device Letters, vol. 7, No. 9,pp.506-509, Sep. 1986.
M. Offenberg et al. "Surface etching and roughening in integrated processing of thermal oxides".Journal of Vacuum Science and Technology A, vol. 9, No. 3,pp.1058-1065,May/Jun. 1991.
R.Moazami et al. "A high-quality stacked thermal/LPCVD gate oxide technology for ULSI",IEEE Electron Device Letters, vol. 14, No. 2, pp. 72-73, Feb. 1993.
J. Li et al. "Accurate determination of defects in the gate oxide of Si metal oxide semiconductor devices by propane infiltration", Journal of Electrochemical Society, vol.140, No. 6,pp. L89-92, Jun. 1993.
C. Yu et al. "Trech doping conformality by plasma immersion ion implantation (PIII)",IEEE Electron Device Letters, vol. 15,No. 6,pp. 196-198, Jun. 1994.
E.Palibroda et al. "A new image of porous aluminum oxide",Materials Science and Engineering B, vol. B32, No. 1-2,pp. 1-5, Jun. 1995.
Schabowska et al. "Electrical conduction in MIM sandwich structures with A1.sub.2 O.sub.3 insulating layers", Thin Solid Films75, 1981, pp. 177-180.
Ohji et al. "Ta205 capacitors' dielectric material for Giga-bit DRAMs", Technical Digest of 1995 Interantional Electron Device Meeting, pp. 111-114, 1995.
Dinkins Anthony
Kincaid Kristine L.
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