Application of 2-dimensional photonic crystals in alignment...

Details Application of 2-dimensional photonic crystals in alignment... Application of 2-dimensional photonic crystals in alignment...

2011-05-17

2011-05-17

Coleman, W. David (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

C257SE23179, C438S401000, C430S005000, C977S773000

Reexamination Certificate

active

07944063

ABSTRACT:
Alignment marks for use on substrates. In one example, the alignment marks consist of periodic 2-dimensional arrays of structures, the spacing of the structures being smaller than an alignment beam but larger than an exposure beam.

REFERENCES:
patent: 5477309 (1995-12-01), Ota et al.
patent: 6628392 (2003-09-01), Kuroda et al.
patent: 6709949 (2004-03-01), Hubner
patent: 6933523 (2005-08-01), Sheck
patent: 7616376 (2009-11-01), Arsenault et al.
patent: 2004/0075179 (2004-04-01), Liu et al.
patent: 2004/0227945 (2004-11-01), Nohdo
patent: 06-224546 (1994-08-01), None
patent: 07-254546 (1995-10-01), None
patent: 2001-060543 (2001-03-01), None
patent: 2001-168194 (2001-06-01), None
patent: 2001-296442 (2001-10-01), None
patent: 2004-077885 (2004-03-01), None
patent: 2004-508711 (2004-03-01), None
patent: 2005-079249 (2005-03-01), None
patent: 2005-079249 (2005-03-01), None
G. Subramania et al., “Fabrication of three-dimensional photonic cyrstal with alignment based on electron beam lithography”, Applied Physics Letters, vol. 85, No. 21, Nov. 22, 2004, pp. 5037-5039.
Philippe Lalanne, et al., “Antireflection Behavior of Silicon Subwavelength Periodic Structures for Visible Light,” Nanotechnology 8 (1997), pp. 53-56.
English translation of Japanese Official Action issued on Jun. 16, 2009 in Japanese Application No. 2006-150762.

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