Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2001-04-05
2004-05-25
Patel, Jayanti K. (Department: 2623)
Image analysis
Applications
Manufacturing or product inspection
C250S559450, C382S274000
Reexamination Certificate
active
06741734
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to an appearance inspection method and an appearance inspection apparatus. More particularly, the present invention relates to an appearance inspection method and an appearance inspection apparatus for an IC package.
2. Description of the Related Art
Conventionally, the following techniques have been well known as an appearance inspection apparatus for an IC package.
Japanese Laid Open Patent Application (JP-A-Heisei, 10-213417) discloses the following method of detecting a position of an IC package. A boundary between a side surface and a top surface of a package is detected by using a histogram. The linearity of a continuous distribution of respective dots is detected from the differential values of distributions at boundary points. Also, a package boundary straight line is detected by using a least square method, from the remaining dots in which non-linear sections caused by loss are removed. Moreover, an intersection of the detected straight lines in an x-direction and a y-direction is assumed to be an origin. Then, the x, y straight lines are rotated by angles equal to each other so that an angle between the two straight lines with the origin as a center is 90 degrees. Then, an x-direction standard axis and a y-direction standard axis are calculated. Accordingly, even if there are a loss, a burr and the like, it is possible to correctly detect the IC position and also possible to correctly set a detection position of a defect item with regard to an appearance inspection, a detection position of a lead and the like.
Japanese Laid Open Patent Application (JP-A-Heisei, 11-14317) discloses the following appearance inspection method. An IC package is photographed by using a TV camera. With regard to a picture data, a scanning start area is set on the periphery of the IC package by using an area set device of a picture data processor, and the scanning is done. A position data group at an end of the IC package is detected by a position data detector. In accordance with this position data group, an inspection target region is set for the picture data by using an inspection target region set device. A picture process is done by a judging device. Then, it is judged whether the IC package is allowed or rejected.
Japanese Laid Open Patent Application (JP-A-Heisei, 7-128249) discloses the following IC extraneous substance detector. A camera photographs a lead of an inspection target IC. An AD converter carries out an AD-conversion. A differential circuit receives a light/shade picture data, and carries out a differential process so that a change point of a concentration is highlighted, and then outputs a differential picture data. A first binary circuit converts a differential picture data in an inspection target region including a plurality of leads stored in an inspection region store circuit into a binary picture data, in accordance with a preset first binary level, and outputs it. A projection circuit measures the number of “1” of the binary picture data in a direction parallel to a longitudinal direction of the lead, and outputs the measured data, and carries out a binary process, and then measures the number of “1” of the binary data in the longitudinal direction of the lead. A second binary circuit converts the measured data into a binary value. A judging circuit counts the continuous number of “0” and “1” in a second binary data, and judges as a deposition of the extraneous substance if there is the continuous numeral without a preset range between an upper limit value and a lower limit value.
Japanese Laid Open Patent Application (JP-A-Heisei, 7-37094) discloses the following picture processor. This is provided with: an editor for editing a history of a picture process program stored in a history program memory; and a corrector for deleting a duplex portion in a picture process command list and an unnecessary component to obtain a final result. An indication from which a user can understand a picture process command and learn a usage method is displayed on a display. An illumination manner suitable for a target sample is determined from an evaluation value of the result treated by the picture processor. A picture process program is generated in accordance with an evaluation value of a feature amount. Also, a function is displayed after a selection based on a combination of measurement values. Then, a function selected on the basis of the indication is added to the picture process program.
Japanese Laid Open Patent Application (JP-A-Heisei, 8-44870) discloses the following method for managing a memory of an appearance inspection apparatus. A non-volatile memory can register therein an environment data with regard to a usage condition, a kind data set for each inspected sample and a user program. The store region of the non-volatile memory is divided into many blocks of a certain size. Also, the non-volatile memory has an allocation table indicative of a correspondence relation between a content stored in each block and a stored block.
Japanese Laid Open Patent Application (JP-A-Heisel, 5-264240) discloses the following appearance inspection apparatus. This is provided with: a photographing device for photographing a pattern formed on a sample; a picture binary converter for converting a photographed picture into a binary value; a radial length measuring device for measuring a length of a pattern in a pattern portion within each of pixel rows extending in a plurality of directions from any central pixel on a binary picture; a center detector for detecting a substantial center of a pattern from the measured lengths in the plurality of directions; a coding device for converting each of the measured lengths in the plurality of directions into a radial code; and a category converter for storing therein in advance a category code indicative of a kind of a pattern form corresponding to each of the various radial codes, and selecting a category stored in accordance with the radial code converted by the coding device, and then converting into the category code. Accordingly, it detects a defect of a pattern in accordance with the category code.
Japanese Laid Open Patent Application (JP-A-Heisei, 7-229842) discloses the following apparatus for inspecting an extraneous substance of IC. This apparatus for inspecting an extraneous substance of IC is provided with: a camera for photographing an IC composed of a shoulder where a lead targeted for an inspection is located in a flat portion on a mold side, a plane on a tip side and a slope located in a middle between those portions; an AD converter for receiving a picture data from the camera, carrying out an AD conversion and outputting a light/shade picture data; an inspection region cutter for cutting an inspection region light/shade picture data in a range including all leads corresponding to one side of the IC from the light/shade picture data; a first binary converter for converting the inspection region light/shade picture data into a binary value so that only the shoulder and the plane of the lead, in which a reflection light amount received by the camera is large, become at “1”; a projecting device for receiving the binary picture data converted into the binary value by the first binary converter, and outputting an X projection data in which the number of “1” pixels in each picture pixel row in an X-direction vertical to a longitudinal direction of the lead is measured; a lead region divider for defining as a slant picture the portion corresponding to a center of the lead in a section where the X projection data in the inspection region light/shade picture data is smaller than a predetermined value, defining as a shoulder picture the portion corresponding to a portion on a mold side of the IC and having a value greater than the predetermined value, and defining as a plane picture the portion corresponding to a portion on the tip of the lead and having a value greater than the predetermined value; and a device for detecting an extraneous substance for e
Nagao Masahiko
Sasaki Yoshihiro
NEC Corporation
Patel Jayanti K.
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