Appearance inspection apparatus with scanning electron...

Details Appearance inspection apparatus with scanning electron... Appearance inspection apparatus with scanning electron...

2009-02-09

2011-12-27

Connolly, Patrick J (Department: 2877)

Image analysis

Applications

Manufacturing or product inspection

Reexamination Certificate

active

08086021

ABSTRACT:
The present invention provides an appearance inspection apparatus that allows a user to give precedence to either defect detection performance or throughput. The appearance inspection apparatus allows a user to select the frequency of a digital image signal or the ratio of the frequency of the digital image signal to a sampling rate. Further, a user is allowed to select either throughput improvement or S/N improvement to prioritize.

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Japanese Office Action issued in Japanese Patent Application No. JP 2008-035106 dated Jul. 13, 2010.

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