Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Using radiant energy
Patent
1998-10-28
2000-09-12
Metjahic, Safet
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Using radiant energy
324752, G01R 3128
Patent
active
06118277&
ABSTRACT:
Disclosed is an appearance inspection apparatus for inspecting whether an appearance state of a main actuator element is adequate or defective by applying an appearance-inspecting voltage to the main actuator element including an upper electrode formed on an upper surface of a shape-retaining layer and a lower electrode formed on a lower surface of the shape-retaining layer. The appearance inspection apparatus comprises an optical detecting unit for electrically detecting the appearance state of the main actuator element on the basis of light emission caused by the main actuator element, and a judging unit for judging whether the appearance state of the main actuator element is adequate or defective on the basis of a level of a detection signal supplied from the optical detecting unit. Accordingly, it is possible to realize high inspection accuracy, reduce inspection time, and simplify the inspection apparatus. Further, the present invention is also applicable to integrated electronic parts.
REFERENCES:
patent: 3629584 (1971-12-01), Blomgren
patent: 5032788 (1991-07-01), Ringled et al.
patent: 5376883 (1994-12-01), Kaito
patent: 5521517 (1996-05-01), Shida et al.
patent: 5640099 (1997-06-01), Sanada
patent: 5781017 (1998-07-01), Cole et al.
Ohnishi Takao
Takeuchi Yukihisa
Tsuji Hiroyuki
Metjahic Safet
NGK Insulators Ltd.
Nguyen Vincent Q.
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