Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate
2007-05-22
2007-05-22
Nguyen, Sang H. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
C356S237300, C359S619000
Reexamination Certificate
active
10764098
ABSTRACT:
The present invention is an appearance inspection apparatus and method utilizing multiple light sources in a lighting unit30to alternately irradiate, line by line, side light from a side light source and slit light from a slit light source onto board1to be inspected. A correction value memory unit stores digital correction values required for correcting shadings for the side light source and the slit light source and an analysis unit utilizes these digital correction values to correct shadings on the image data. A highly accurate image is thus obtained.
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Anderson Kill & Olick PC
Nguyen Sang H.
SAKI Corporation
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