Coating apparatus – Projection or spray type – Flexible web or strand work
Reexamination Certificate
2006-09-26
2006-09-26
Fiorilla, Chris (Department: 1734)
Coating apparatus
Projection or spray type
Flexible web or strand work
C118S300000, C118S315000
Reexamination Certificate
active
07112245
ABSTRACT:
A planarizing pad for planarizing a microelectronic substrate, and a method and apparatus for forming the planarizing pad. In one embodiment, planarizing pad material is mixed with compressed gas to form a plurality of discrete elements that are distributed on a support material. At least a portion of the discrete elements are spaced apart from each other on the support material to form a textured surface for engaging a microelectronic substrate and removing material from the microelectronic substrate. The discrete elements can be uniformly or randomly distributed on the support material, and the discrete elements can be directly affixed to the support material or affixed to the support material with an adhesive.
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Agarwal Vishnu K.
Chopra Dinesh
Perkins Coie LLP
Tadesse Yewebdar
LandOfFree
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