Abrading – Abrading process – With tool treating or forming
Reexamination Certificate
2005-06-07
2005-06-07
Wilson, Lee D. (Department: 3723)
Abrading
Abrading process
With tool treating or forming
C451S007000, C451S072000, C451S443000, C451S449000
Reexamination Certificate
active
06902470
ABSTRACT:
The invention includes a method for conditioning a surface of a polishing pad after chemical-mechanical polishing of a semiconductor substrate with the pad surface. The method includes exposing the pad surface to steam, and the steam can comprise ammonium citrate. The invention also includes an apparatus for conditioning a surface of a polishing pad after chemical-mechanical polishing of a semiconductor substrate with the pad surface. The apparatus includes a conditioning stone, and a steam outlet port proximate the conditioning stone. The steam outlet port is configured to jet steam onto the pad surface during the conditioning of the pad surface.
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Micro)n Technology, Inc.
Ojini Anthony
Wilson Lee D.
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