Apparatuses and methods for monitoring rotation of a...

Electricity: measuring and testing – Electrical speed measuring – Including speed analog electrical signal generator

Reexamination Certificate

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C451S287000, C015S077000, C015S088300

Reexamination Certificate

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11376959

ABSTRACT:
Apparatuses and methods for monitoring microfeature workpiece rotation during processing, such as brushing, by monitoring characteristics corresponding to a state of a magnetic field proximate to the rotating microfeature workpiece are disclosed herein. The characteristic can depend on the relative motion between the magnetic field and the conductive material of the microfeature workpiece. The characteristic can include the strength of the magnetic field, current in an electromagnet circuit used to create the magnetic field, force exerted on the magnetic field source, or movement of the magnetic field source. The apparatus can include a feedback control device to adjust the rotation speed of the microfeature workpiece based on the characteristic detected.

REFERENCES:
patent: 4751459 (1988-06-01), Stupak, Jr.
patent: 5020283 (1991-06-01), Tuttle
patent: 5069002 (1991-12-01), Sandhu et al.
patent: 5081796 (1992-01-01), Schultz
patent: 5177908 (1993-01-01), Tuttle
patent: 5232875 (1993-08-01), Tuttle et al.
patent: 5234867 (1993-08-01), Schultz et al.
patent: 5240552 (1993-08-01), Yu et al.
patent: 5244534 (1993-09-01), Yu et al.
patent: 5245790 (1993-09-01), Jerbic
patent: 5245796 (1993-09-01), Miller et al.
patent: RE34425 (1993-11-01), Schultz
patent: 5297364 (1994-03-01), Tuttle
patent: 5367257 (1994-11-01), Garshelis
patent: 5421769 (1995-06-01), Schultz et al.
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5449314 (1995-09-01), Meikle et al.
patent: 5486129 (1996-01-01), Sandhu et al.
patent: 5514245 (1996-05-01), Doan et al.
patent: 5533924 (1996-07-01), Stroupe et al.
patent: 5540810 (1996-07-01), Sandhu et al.
patent: 5609718 (1997-03-01), Meikle
patent: 5618381 (1997-04-01), Doan et al.
patent: 5618447 (1997-04-01), Sandhu
patent: 5624303 (1997-04-01), Robinson
patent: 5643060 (1997-07-01), Sandhu et al.
patent: 5650619 (1997-07-01), Hudson
patent: 5658183 (1997-08-01), Sandhu et al.
patent: 5658190 (1997-08-01), Wright et al.
patent: 5664988 (1997-09-01), Stroupe et al.
patent: 5679065 (1997-10-01), Henderson
patent: 5690540 (1997-11-01), Elliott et al.
patent: 5698455 (1997-12-01), Meikle et al.
patent: 5700180 (1997-12-01), Sandhu et al.
patent: 5702292 (1997-12-01), Brunelli et al.
patent: 5730642 (1998-03-01), Sandhu et al.
patent: 5733176 (1998-03-01), Robinson et al.
patent: 5736427 (1998-04-01), Henderson
patent: 5738567 (1998-04-01), Manzonie et al.
patent: 5747386 (1998-05-01), Moore
patent: 5792709 (1998-08-01), Robinson et al.
patent: 5795218 (1998-08-01), Doan et al.
patent: 5795495 (1998-08-01), Meikle
patent: 5807165 (1998-09-01), Uzoh et al.
patent: 5823855 (1998-10-01), Robinson
patent: 5825028 (1998-10-01), Hudson
patent: 5830806 (1998-11-01), Hudson et al.
patent: 5842909 (1998-12-01), Sandhu et al.
patent: 5851135 (1998-12-01), Sandhu et al.
patent: 5868896 (1999-02-01), Robinson et al.
patent: 5871392 (1999-02-01), Meikle et al.
patent: 5879222 (1999-03-01), Robinson
patent: 5882248 (1999-03-01), Wright et al.
patent: 5893754 (1999-04-01), Robinson et al.
patent: 5895550 (1999-04-01), Andreas
patent: 5910043 (1999-06-01), Manzonie et al.
patent: 5919082 (1999-07-01), Walker et al.
patent: 5934980 (1999-08-01), Koos et al.
patent: 5938801 (1999-08-01), Robinson
patent: 5945347 (1999-08-01), Wright
patent: 5954912 (1999-09-01), Moore
patent: 5967030 (1999-10-01), Blalock
patent: 5972792 (1999-10-01), Hudson
patent: 5976000 (1999-11-01), Hudson
patent: 5980363 (1999-11-01), Meikle et al.
patent: 5981396 (1999-11-01), Robinson et al.
patent: 5989470 (1999-11-01), Doan et al.
patent: 5990012 (1999-11-01), Robinson et al.
patent: 5994224 (1999-11-01), Sandhu et al.
patent: 5997384 (1999-12-01), Blalock
patent: 6036586 (2000-03-01), Ward
patent: 6039633 (2000-03-01), Chopra
patent: 6040245 (2000-03-01), Sandhu et al.
patent: 6054015 (2000-04-01), Brunelli et al.
patent: 6062958 (2000-05-01), Wright et al.
patent: 6066030 (2000-05-01), Uzoh
patent: 6074286 (2000-06-01), Ball
patent: 6083085 (2000-07-01), Lankford
patent: 6090475 (2000-07-01), Robinson et al.
patent: 6110820 (2000-08-01), Sandhu et al.
patent: 6113463 (2000-09-01), Hasegawa et al.
patent: 6114706 (2000-09-01), Meikle et al.
patent: 6116988 (2000-09-01), Ball
patent: 6120354 (2000-09-01), Koos et al.
patent: 6135856 (2000-10-01), Tjaden et al.
patent: 6136043 (2000-10-01), Robinson et al.
patent: 6139402 (2000-10-01), Moore
patent: 6143123 (2000-11-01), Robinson et al.
patent: 6143155 (2000-11-01), Adams et al.
patent: 6152808 (2000-11-01), Moore
patent: 6176763 (2001-01-01), Kramer et al.
patent: 6176992 (2001-01-01), Talieh
patent: 6186870 (2001-02-01), Wright et al.
patent: 6187681 (2001-02-01), Moore
patent: 6191037 (2001-02-01), Robinson et al.
patent: 6193588 (2001-02-01), Carlson et al.
patent: 6196899 (2001-03-01), Chopra et al.
patent: 6200901 (2001-03-01), Hudson et al.
patent: 6203404 (2001-03-01), Joslyn et al.
patent: 6203407 (2001-03-01), Robinson
patent: 6203413 (2001-03-01), Skrovan
patent: 6206754 (2001-03-01), Moore
patent: 6206756 (2001-03-01), Chopra et al.
patent: 6206759 (2001-03-01), Agarwal et al.
patent: 6210257 (2001-04-01), Carlson
patent: 6213845 (2001-04-01), Elledge
patent: 6218316 (2001-04-01), Marsh
patent: 6220934 (2001-04-01), Sharples et al.
patent: 6224466 (2001-05-01), Walker et al.
patent: 6227955 (2001-05-01), Custer et al.
patent: 6234874 (2001-05-01), Ball
patent: 6234877 (2001-05-01), Koos et al.
patent: 6234878 (2001-05-01), Moore
patent: 6237483 (2001-05-01), Blalock
patent: 6238273 (2001-05-01), Southwick
patent: 6244944 (2001-06-01), Elledge
patent: 6250994 (2001-06-01), Chopra et al.
patent: 6251785 (2001-06-01), Wright
patent: 6254460 (2001-07-01), Walker et al.
patent: 6261151 (2001-07-01), Sandhu et al.
patent: 6261163 (2001-07-01), Walker et al.
patent: 6267650 (2001-07-01), Hembree
patent: 6273786 (2001-08-01), Chopra et al.
patent: 6273796 (2001-08-01), Moore
patent: 6273800 (2001-08-01), Walker et al.
patent: 6276996 (2001-08-01), Chopra
patent: 6277015 (2001-08-01), Robinson et al.
patent: 6284660 (2001-09-01), Doan
patent: 6290579 (2001-09-01), Walker et al.
patent: 6296557 (2001-10-01), Walker
patent: 6306012 (2001-10-01), Sabde
patent: 6306014 (2001-10-01), Walker et al.
patent: 6306768 (2001-10-01), Klein
patent: 6309282 (2001-10-01), Wright et al.
patent: 6312558 (2001-11-01), Moore
patent: 6313038 (2001-11-01), Chopra et al.
patent: 6325702 (2001-12-01), Robinson
patent: 6328632 (2001-12-01), Chopra
patent: 6331135 (2001-12-01), Sabde et al.
patent: 6331139 (2001-12-01), Walker et al.
patent: 6331488 (2001-12-01), Doan et al.
patent: 6338667 (2002-01-01), Sandhu et al.
patent: 6350180 (2002-02-01), Southwick
patent: 6350691 (2002-02-01), Lankford
patent: 6352466 (2002-03-01), Moore
patent: 6354919 (2002-03-01), Chopra
patent: 6354923 (2002-03-01), Lankford
patent: 6354930 (2002-03-01), Moore
patent: 6358122 (2002-03-01), Sabde et al.
patent: 6358127 (2002-03-01), Carlson et al.
patent: 6358129 (2002-03-01), Dow
patent: 6361400 (2002-03-01), Southwick
patent: 6361417 (2002-03-01), Walker et al.
patent: 6361832 (2002-03-01), Agarwal et al.
patent: 6364749 (2002-04-01), Walker
patent: 6364757 (2002-04-01), Moore
patent: 6368190 (2002-04-01), Easter et al.
patent: 6368193 (2002-04-01), Carlson et al.
patent: 6368194 (2002-04-01), Sharples et al.
patent: 6368197 (2002-04-01), Elledge
patent: 6376381 (2002-04-01), Sabde
patent: 6383934 (2002-05-01), Sabde et al.
patent: 6387289 (2002-05-01), Wright
patent: 6395620 (2002-05-01), Pan et al.
patent: 6402884 (2002-06-01), Robinson et al.
patent: 6409576 (2002-06-01), Oguri et al.
patent: 6409586 (2002-06-01), Walker et al.
patent: 6428386 (2002-08-01), Bartlett
patent: 6447369 (2002-09-01), Moore
patent: 6462535 (2002-10-01), Schwabe
patent: 6498101 (2002-12-01), Wang
patent: 6502271 (2003-01-01), Epshteyn
patent: 6520834 (2003-02-01), Marshall
patent: 6533893 (2003-03-01), Sabde et al.
patent: 6538433 (2003-03-01), Cervantes et al.
patent: 6547640 (2003-04-01), Hofmann
patent: 6548407 (2003-04-01), Chopra et al.
patent: 6579799 (2003-06-01), Chopra et al.
patent: 6592443 (2003-07-01),

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