Electricity: measuring and testing – Electrical speed measuring – Including speed analog electrical signal generator
Reexamination Certificate
2007-02-13
2007-02-13
Lefkowitz, Edward (Department: 2862)
Electricity: measuring and testing
Electrical speed measuring
Including speed analog electrical signal generator
C451S287000, C015S077000, C015S088300
Reexamination Certificate
active
11376959
ABSTRACT:
Apparatuses and methods for monitoring microfeature workpiece rotation during processing, such as brushing, by monitoring characteristics corresponding to a state of a magnetic field proximate to the rotating microfeature workpiece are disclosed herein. The characteristic can depend on the relative motion between the magnetic field and the conductive material of the microfeature workpiece. The characteristic can include the strength of the magnetic field, current in an electromagnet circuit used to create the magnetic field, force exerted on the magnetic field source, or movement of the magnetic field source. The apparatus can include a feedback control device to adjust the rotation speed of the microfeature workpiece based on the characteristic detected.
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Lefkowitz Edward
Micro)n Technology, Inc.
Perkins Coie LLP
Whittington Kenneth J.
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