Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2005-04-26
2005-04-26
Nguyen, George (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S057000, C451S287000, C451S443000, C451S444000
Reexamination Certificate
active
06884152
ABSTRACT:
Apparatuses and methods for conditioning polishing pads used in polishing micro-device workpieces are disclosed herein. In one embodiment, an end effector for conditioning a polishing pad includes a member having a first surface and a plurality of contact elements projecting from the first surface. The member also includes a plurality of apertures configured to flow conditioning solution to the polishing pad. The apertures can extend from the first surface to a second surface opposite the first surface. The member can further include a manifold that is in fluid communication with the apertures. In another embodiment, a conditioner for conditioning the polishing pad includes an arm having at least one spray nozzle configured to spray conditioning solution onto the polishing pad and an end effector coupled to the arm. The end effector includes a first surface and a plurality of contact elements projecting from the first surface.
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Nguyen George
Perkins Coie LLP
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