Abrading – Abrading process – With tool treating or forming
Reexamination Certificate
2011-08-16
2011-08-16
Rose, Robert (Department: 3727)
Abrading
Abrading process
With tool treating or forming
C451S443000
Reexamination Certificate
active
07997958
ABSTRACT:
Apparatuses and methods for conditioning polishing pads used in polishing micro-device workpieces are disclosed herein. In one embodiment, an end effector for conditioning a polishing pad includes a member having a first surface and a plurality of contact elements projecting from the first surface. The member also includes a plurality of apertures configured to flow conditioning solution to the polishing pad. The apertures can extend from the first surface to a second surface opposite the first surface. The member can further include a manifold that is in fluid communication with the apertures. In another embodiment, a conditioner for conditioning the polishing pad includes an arm having at least one spray nozzle configured to spray conditioning solution onto the polishing pad and an end effector coupled to the arm. The end effector includes a first surface and a plurality of contact elements projecting from the first surface.
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Micro)n Technology, Inc.
Perkins Coie LLP
Rose Robert
LandOfFree
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