Material or article handling – Apparatus for charging a load holding or supporting element...
Reexamination Certificate
2006-10-03
2006-10-03
Underwood, Donald (Department: 3652)
Material or article handling
Apparatus for charging a load holding or supporting element...
C414S217000, C414S939000
Reexamination Certificate
active
07114903
ABSTRACT:
An apparatus and method for handling and/or pre-processing microelectronic workpieces. In one embodiment, the apparatus includes an input/output station configured to removably receive a plurality of microelectronic workpieces at an input/output location, a transfer station, and a first transfer device that moves the microelectronic workpieces directly between the input/output location and the transfer station. A second transfer device moves the microelectronic workpieces directly from the transfer station to at least one process station. The transfer station can include a pre-process station configured to identify and/or align the microelectronic workpieces. The apparatus can further include a storage station configured to support a plurality of microelectronic workpieces and can be positioned to at least partially overlap the pre-process station.
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Hanson Kyle M.
Harris Randy A.
Perkins Coie LLP
Semitool Inc.
Underwood Donald
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