Apparatus utilizing charged particles

Details Apparatus utilizing charged particles Apparatus utilizing charged particles

1987-07-27

1989-02-21

Moore, David K.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

250251, 250423R, 2504923, 313230, 31323131, 31511141, H01J 37256, H01J 37317

Patent

active

048068292

ABSTRACT:
An apparatus utilizing charged particles comprises a means for generating charged particles which are irradiated on the surface of a material and a means for generating plasma in the neighborhood of the surface of the material. The plasma generated by the plasma generating means can neutralize incident charge, to prevent an accumulation of the charge on the surface of the material.

REFERENCES:
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patent: 3790411 (1974-02-01), Simms et al.
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patent: 4419203 (1983-12-01), Harper et al.
patent: 4438368 (1984-03-01), Abe et al.
patent: 4463255 (1984-07-01), Robertson et al.
patent: 4585945 (1986-04-01), Bruel et al.
patent: 4639301 (1987-01-01), Doherty et al.
patent: 4645929 (1987-02-01), Crigern et al.
patent: 4652795 (1987-03-01), Lee et al.

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