Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate
2008-07-08
2008-07-08
Le, Dung A. (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Including dielectric isolation means
C257S510000, C257S521000, C257SE21546
Reexamination Certificate
active
07397105
ABSTRACT:
A deep n-well is formed beneath the area of a capacitor structure. The use of a deep n-well lessens the parasitic capacitance by placing a diode in series with the interlayer dielectric cap. The deep n-well also reduces substrate noise. Once the n-well is implanted and annealed, a cross hatch of shallow trench isolation is patterned over the n-well. The shallow trench isolation reduces and confines the inductively and/or capacitively coupled surface currents to small areas that are then isolated from the rest of the chip.
REFERENCES:
patent: 6306720 (2001-10-01), Ding
patent: 2004/0195650 (2004-10-01), Yang et al.
patent: 2005/0023639 (2005-02-01), Yeh et al.
Erickson Sean Christopher
Hudson Jason Dee
Le Dung A.
LSI Corporation
Yee & Associates
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