Apparatus to check calibration of mass flow controllers

Details Apparatus to check calibration of mass flow controllers Apparatus to check calibration of mass flow controllers

1997-01-10

1998-04-28

Raevis, Robert

Measuring and testing

Instrument proving or calibrating

Volume of flow, speed of flow, volume rate of flow, or mass...

G01F 2500

Patent

active

057446954

ABSTRACT:
A calibration apparatus is applied to a gas control panel (46) that uses mass flow controllers (70,98,118) to control the flows of different gases to a processing chamber (42). The gas control panel (46) includes a mass flow meter (150) mounted on the gas control panel (46). The mass flow meter (150) is connected between pre-existing and unused gas valves (152, 156) on the gas control panel (46) in place of a mass flow controller that is also otherwise unused. The meter input valve (152) for the mass flow meter (150) is in fluid communication with the mass flow controllers (70, 98, 118). The input and output meter valves (152, 156) are connected to respective pre-existing solenoids (154, 158) which in turn are connected to a gas flow control (48). A final valve solenoid (82) controls a final valve (80) which is also in fluid communication with the mass flow controllers (70, 98, 118) and routes the gases to the processing chamber (42). The calibration system includes a switching device (162) mounted on the gas control panel (46) and connected between the output (163) of the final valve solenoid (82) and a control input (81) of the final valve (82). The switching device (162) has a control input (164) connected to an output of the meter input valve solenoid (154). Thus, in one state, the meter input solenoid (154) inhibits gas flow through the processing chamber (42) and permits gas flow from the mass flow controllers (70, 98, 118), through the mass flow meter (150) in order to check the calibration of the mass flow controllers. In an opposite state, the meter input solenoid (154) inhibits gas flow through the mass flow meter (150) and permits flow to the processing chamber (42).

REFERENCES:
patent: 5233861 (1993-08-01), Gore et al.

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