Scanning-probe techniques or apparatus; applications of scanning – Particular type of scanning probe microscopy or microscope;... – Scanning tunnelling microscopy or apparatus therefor – e.g.,...
Reexamination Certificate
2011-05-17
2011-05-17
Nguyen, Kiet T (Department: 2881)
Scanning-probe techniques or apparatus; applications of scanning
Particular type of scanning probe microscopy or microscope;...
Scanning tunnelling microscopy or apparatus therefor, e.g.,...
C850S040000, C850S048000, C850S053000, C073S105000
Reexamination Certificate
active
07945964
ABSTRACT:
Provided are a structure of an apparatus for analysis, inspection, and measurement in which a support structure supporting a detection unit is resistant to disturbance, suppresses a reduction in resolution during large-sample measurement, and has high rigidity, and a probe microscope using the apparatus structure. The apparatus structure supporting the detection unit which is opposed to a sample which is located on a unit movable in at least one axis direction and is an object to be analyzed has an arch shape. In the apparatus structure having the arch shape and supporting the detection unit, a surface substantially perpendicular to a flat surface portion of a sample holder located immediately under the apparatus structure is formed. The detection unit is supported on the perpendicular surface. The arch-shaped apparatus structure is a curved structure consistent with a catenary curve.
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Akamatsu Ken-ichi
Wakiyama Shigeru
Brinks Hofer Gilson & Lione
Nguyen Kiet T
SII NanoTechnology Inc.
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