Data processing: measuring – calibrating – or testing – Measurement system – Remote supervisory monitoring
Reexamination Certificate
2006-11-07
2006-11-07
Wachsman, Hal (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Remote supervisory monitoring
C702S182000, C702S184000, C702S187000, C702S185000
Reexamination Certificate
active
07133807
ABSTRACT:
There is provided a system and method for monitoring an apparatus from a remote location. A vendor-side computer obtains operating state data obtained by a monitoring device provided in an apparatus via a communication line, and monitors the operating state of the apparatus from a remote location. Maintenance data at a part replacing time is transmitted from the apparatus, and the vendor-side computer that has received maintenance data calculates an optimal replacement period of a part based on this. The calculated optimal replacement period of each part is sent to a plant. The plant feeds the optimal replacement period back to the operation of the apparatus, so that productivity can be improved.
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Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Tokyo Electron Limited
Wachsman Hal
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