Cleaning and liquid contact with solids – Apparatus – With spray or jet supplying and/or applying means
Reexamination Certificate
2007-06-05
2007-06-05
Barr, Michael (Department: 1746)
Cleaning and liquid contact with solids
Apparatus
With spray or jet supplying and/or applying means
C134S063000, C134S137000, C134S16600C, C134S16700R, C015S300100, C015S306100, C015S301000, C015S308000, C015S302000, C015S303000, C015S320000, C034S102000, C034S576000, C034S191000, C156S345100, C156S345540
Reexamination Certificate
active
10433833
ABSTRACT:
The present invention is a method, apparatus and process for an improved substrate mounting and processing technique for various substrate treatments comprising cleaning, dicing, sawing, polishing, and planarization, among others.
REFERENCES:
patent: 5989355 (1999-11-01), Brandt et al.
patent: 5996353 (1999-12-01), Maxwell et al.
Barr Michael
Patel Rita Ramesh
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