Coating processes – With post-treatment of coating or coating material – Heating or drying
Reexamination Certificate
2005-04-29
2008-09-16
Zimmer, Marc S. (Department: 1796)
Coating processes
With post-treatment of coating or coating material
Heating or drying
C427S096100, C427S097600, C427S255180, C427S255280, C427S255370, C427S373000
Reexamination Certificate
active
07425350
ABSTRACT:
A method for making a Si-containing material comprises transporting a pyrolyzed Si-precursor to a substrate and polymerizing the pyrolyzed Si-precursor on the substrate to form a Si-containing film. Polymerization of the pyrolyzed Si-precursor may be carried out in the presence of a porogen to thereby form a porogen-containing Si-containing film. The porogen may be removed from the porogen-containing Si-containing film to thereby form a porous Si-containing film. Preferred porous Si-containing films have low dielectric constants and thus are suitable for various low-k applications such as in microelectronics and microelectromechanical systems.
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ASM Japan K.K.
Knobbe Martens Olson & Bear LLP
Zimmer Marc S.
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