Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1997-03-07
1998-10-27
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356124, G01C 902
Patent
active
058284559
ABSTRACT:
A reticle consisting of a multiplicity of small openings corresponding to separate and distinguishable points is put in the reticle plane. This reticle is imaged down through an opening O in aperture plate AP. A corresponding multiplicity of spots are created at the image plane of the optical system. These spots have spot centroids relative to the original separate and distinguishable points in the reticle. These points, however, are deviated from their diffraction limited positions by the average of grad .phi.(u)) over the corresponding ray bundle. The opening O in the aperture plate samples a discrete portion of the entrance pupil. With points spread out over an area of size 2*NAo*za, ray bundles with chief rays covering the entire entrance pupil will be projected down to image plane IP. The above outlined procedure is extended to analyzing the wavefront at a multiplicity of field points over the entire lens train. The process includes using an aperture plate AP consisting of a multiplicity of openings O. Each opening O is centered underneath a neighborhood of points that is accepted into the entrance pupil of the imaging objective. Points passing through all openings O will produce in the wafer plane a number of spot arrays corresponding to the number of openings O. The totality of all the arrays of spots whose centroids can be measured and reconstructed yields an aberrated wavefront .phi.(u;x) at a number of discrete field points x.
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"In-Situ Optimizat
Hunter, Jr. Robert O.
McArthur Bruce B.
Smith Adlai H.
Litel Instruments
Turner Samuel A.
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