Apparatus, method and system for fabricating a patterned...

Details Apparatus, method and system for fabricating a patterned... Apparatus, method and system for fabricating a patterned...

2005-04-04

2010-02-23

Mercedes, Dismery E (Department: 2627)

Dynamic magnetic information storage or retrieval

Record medium

C360S016000, C360S018000, C360S048000, C427S127000, C427S282000, C428S826000, C428S836200

Reexamination Certificate

active

07667929

ABSTRACT:
An apparatus, system, and method are disclosed for fabricating a patterned media imprint master. A substrate and a deposition mask may be fixably attached by an intervening spacing element, such that the substrate and deposition mask act as a unified element during a deposition process. A deposition mask may include a plurality of apertures generated by a conventional lithographic process. Material may be deposited onto the substrate through the deposition mask from more than one deposition source oriented at a unique deposition angle. A resulting substrate deposition pattern thus exhibits a density greater than a deposition mask aperture density while avoiding deposition pattern distortion.

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