Apparatus, method, and system capable of producing a...

Details Apparatus, method, and system capable of producing a... Apparatus, method, and system capable of producing a...

2011-03-15

2011-03-15

Enad, Elvin G (Department: 2832)

Coating processes

Magnetic base or coating

Magnetic coating

C335S296000

Reexamination Certificate

active

07906170

ABSTRACT:
An apparatus capable of producing a moveable magnetic field includes a moveable support structure (110) and a magnetic field source (120) supported by the moveable support structure, where the magnetic field source is in a fixed position relative to the moveable support structure. The magnetic field source generates a magnetic field at a wafer surface of at least approximately 50 Oersted, and the magnetic field is aligned so as to produce magnetic anisotropy in a plane of the moveable support structure.

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