Apparatus, method and program for generating a recipe for an...

Details Apparatus, method and program for generating a recipe for an... Apparatus, method and program for generating a recipe for an...

2006-08-22

2006-08-22

Cabrera, Zoila (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C716S116000, C716S030000

Reexamination Certificate

active

07096086

ABSTRACT:
An apparatus for generating a recipe for an inspection tool includes an extracting module extracting recipe parameters to be set to the inspection tool from among a group of recipe, a recipe candidate generator generating recipe candidates by combining settings of recipe parameters, a calculator calculating detecting parameters for each of the recipe candidates by inspecting a product using the inspection tool to which each of the recipe candidate is applied; and a recipe selecting module selecting a recipe candidate as a recipe for the inspection tool from among the recipe candidates.

REFERENCES:
patent: 6583870 (2003-06-01), Noda
patent: 2005/0022932 (2005-02-01), Kagoshima et al.
patent: 2005/0160394 (2005-07-01), Bevis
patent: 2006/0025948 (2006-02-01), Coldren et al.

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