Semiconductor device manufacturing: process – Electron emitter manufacture
Reexamination Certificate
2006-08-29
2006-08-29
Pert, Evan (Department: 2826)
Semiconductor device manufacturing: process
Electron emitter manufacture
C438S800000, C977S857000
Reexamination Certificate
active
07098056
ABSTRACT:
A method for producing carbon nanotubes, the method comprising: (a) providing a substrate with a top surface, (b) forming an island of catalyst material on the top surface using a tip having a patterning compound thereon, (c) heating the substrate and catalyst island, and (d) contacting the catalyst island with a carbon-containing gas for a period of time sufficient to form the nanotubes on the catalyst island.
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Nanoink, Inc.
Pert Evan
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