Apparatus including integral actuator with control for automated

Details Apparatus including integral actuator with control for automated Apparatus including integral actuator with control for automated

1999-06-25

2000-08-22

Gutierrez, Diego

Thermal measuring and testing

Thermal calibration system

374141, 392416, 219390, 427521, 427557, 438796, G01K 1500, H01L 2102, F27D 1100

Patent

active

061061484

ABSTRACT:
This invention presents an automatic calibration system and method for calibration of a substrate temperature sensor in a thermal processing equipment, such as a rapid thermal processing system. The calibration system includes a temperature-sensitive probe associated with the substrate temperature sensor to calibrate the substrate temperature sensor and an actuator to position the temperature-sensitive probe relative to the substrate during a calibration cycle. The actuator and temperature-sensitive probe of the automatic calibration system can be incorporated into the thermal processing equipment in order to maintain the thermal processing equipment cleanliness and integrity during a calibration cycle, and to allow rapid automated calibration. In the preferred embodiment of this invention, the temperature-sensitive probe and its actuator are implemented in the gas showerhead assembly of a rapid thermal processing system.

REFERENCES:
patent: 4854727 (1989-08-01), Pecot et al.
patent: 4969748 (1990-11-01), Crowley et al.
patent: 4984902 (1991-01-01), Crowley et al.
patent: 5265957 (1993-11-01), Moslehi et al.
patent: 5305417 (1994-04-01), Najm et al.
patent: 5326170 (1994-07-01), Moslehi et al.
patent: 5436494 (1995-07-01), Moslehi
patent: 5446824 (1995-08-01), Moslehi
patent: 5539855 (1996-07-01), Takahashi et al.
patent: 5601366 (1997-02-01), Paranipe
patent: 5635409 (1997-06-01), Moslehi
patent: 5715361 (1998-02-01), Moslehi
patent: 5743644 (1998-04-01), Kobayashi et al.
patent: 5848842 (1998-12-01), Peuse et al.

Affiliated with

Also associated with

Rating

Apparatus including integral actuator with control for automated does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus including integral actuator with control for automated, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus including integral actuator with control for automated will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-572938