Electricity: measuring and testing – Magnetic – Magnetometers
Patent
1993-10-26
1996-11-05
O'Shea, Sandra L.
Electricity: measuring and testing
Magnetic
Magnetometers
324262, G01R 3302, G01R 33025
Patent
active
055721222
ABSTRACT:
An apparatus for measuring an electromagnetic field distribution using a focused electron beam can measure the electromagnetic field distribution in a specimen with high resolution and high reliability. A focused electron beam radiation system irradiates a specimen with a focused electron beam. A specimen tilt mechanism tilts a specimen by 180.degree. about a tilt axis that is perpendicular to the optical axis of the focused electron beam. An electron beam position detector measures the direction and quantity of the deflection given to the focused electron beam when it is transmitted through the specimen. Further, a processing system calculates the direction and the intensity of an electric field, and the direction and the intensity of a magnetic field separately at a point on the specimen through which the focused electron beam is transmitted, from the data on the direction and the quantity of the deflection of the focused electron beam measured by the electron beam position detector before and after the turnover of the specimen by the specimen tilt mechanism. Thus, an electric field and a magnetic field in a specimen can be separately observed independently of each other.
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The American Physical Society, Physical Review B, vol. 34, No. 5, Sep. 1986, "Holographic Interference Electron Microscopy for Determining Specimen Magnetic Structure and Thickness Distribution", A. Tonomura et al., pp. 3397-3402.
Hosoki Shigeyuki
Ichikawa Masakazu
Takahashi Yoshio
Yajima Yusuke
Hitachi , Ltd.
O'Shea Sandra L.
Phillips Roger
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