Apparatus including a light-detecting element having a photo-ele

Details Apparatus including a light-detecting element having a photo-ele Apparatus including a light-detecting element having a photo-ele

1995-05-30

1997-08-12

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

250237G, G01B 902

Patent

active

056571259

ABSTRACT:
An apparatus for detecting information relating to displacement of an object on which a grating scale is affixed. The apparatus includes a beam-emitting system for irradiating the grating scale with a beam. The apparatus also includes a light-detecting element having a light-receiving surface. A grating portion is integrally formed on at least a part of the light-receiving surface for detecting a beam from the grating scale which is irradiated by the beam from the beam-emitting system. Information relating to displacement of the object is detected on the basis of the detection by the grating portion of the light-detecting element.

REFERENCES:
patent: 4564294 (1986-01-01), Ganst
patent: 4668093 (1987-05-01), Cahill
patent: 4970388 (1990-11-01), Nishimura et al.
patent: 5038032 (1991-08-01), Nishimura et al.
patent: 5066129 (1991-11-01), Matsui
patent: 5155355 (1992-10-01), Kabaya
patent: 5283434 (1994-02-01), Ishizuka et al.

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