Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1988-03-11
1989-06-06
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, 36457101, 250311, G01R 3100, G01R 3101
Patent
active
048375063
ABSTRACT:
An apparatus which is used for non-contact electrical measurement and physical alteration of certain characteristics and properties of electronic conductor devices. The apparatus includes a focused source of ultraviolet light which is capable of micron and sub-micron resolution. In the measurement mode the apparatus measures the energy of electrons ejected from a measurement site by the UV beam. This measurement is accomplished at a nulling/repelling device. In the alteration mode, the focused UV light beam interacts with various compounds, for example chemical gases, to create a selective reaction at specific locations at the surface of the device being operated upon. The measurement function can be related to voltage, current, temperature or the like and may be either qualitative or quantitative while being made in a non-contact basis.
REFERENCES:
patent: 3668401 (1972-06-01), Shah et al.
patent: 3919550 (1975-11-01), Bambury
patent: 3919558 (1975-11-01), Brouillette et al.
patent: 4307453 (1981-12-01), Kleiss
patent: 4348732 (1982-09-01), Kreft
patent: 4355232 (1982-10-01), Tokodoro et al.
patent: 4459180 (1984-07-01), Fogel
patent: 4629889 (1986-12-01), Tokodoro et al.
patent: 4670710 (1987-06-01), Beha et al.
patent: 4703260 (1987-10-01), Beha et al.
patent: 4736159 (1988-04-01), Shiragasawa et al.
"Contactless Measurement of Voltage Levels Using Photoemission", by Rudolf, IBm Tech. Disc. Bull., vol. 25, #3A, 8/82, pp. 1171-1172.
"The Observation of Fast Voltage Wafeforms In the SEM", by Thomas et al, Scanning Electron Microscopy, 1976, part 4, 4/76, pp. 609-614.
"Scanning Electron Beam Probes VLSI Chips", by Fazekas et al, Electronics, vol. 54, #14, 7/81, pp. 105-112.
"Secondary Electron Detection Systems for Quant. Voltage Meas.", by Mengel et al, Scanning, vol. 5, #4, 2/83, pp. 151-171.
Burns W.
Eisenzopf Reinhard J.
Ultraprobe, Inc.
Weber Jr. G. Donald
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