Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1997-04-08
1999-07-20
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356 285, G01B 902
Patent
active
059262761
ABSTRACT:
An optical displacement measuring apparatus including an afocal optical system within a plane containing paths of at least two light beams. The afocal optical system includes a first lens optical unit and a second lens optical unit having a focal length which is greater than the focal length of the first lens optical unit. The distance between a diffraction grating and the first lens optical unit is smaller than the focal length of the first lens optical unit. The second lens optical unit is a combination of a lens with a negative refractive power and a lens with a positive refractive power. Accordingly, the optical displacement measuring apparatus performs accurate measurements with a large measurement depth, even for the cases where an afocal optical system is constructed within a plane containing the paths of the two light beams and the working distance is increased without increasing the size of an optical head.
REFERENCES:
patent: 5483332 (1996-01-01), Takamiya et al.
patent: 5502466 (1996-03-01), Kato et al.
patent: 5552879 (1996-09-01), Takamiya et al.
patent: 5629793 (1997-05-01), Takamiya et al.
patent: 5640239 (1997-06-01), Takamiya et al.
Kato Shigeki
Takamiya Makoto
Canon Kabushiki Kaisha
Turner Samuel A.
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