Apparatus having a static eliminator for manufacturing...

Details Apparatus having a static eliminator for manufacturing... Apparatus having a static eliminator for manufacturing...

2005-06-21

2005-06-21

Toatley, Jr., Gregory J. (Department: 2836)

Electricity: electrical systems and devices

Discharging or preventing accumulation of electric charge

By charged gas irradiation

C361S222000, C361S234000

Reexamination Certificate

active

06909587

ABSTRACT:
An ion generator generates ions above a semiconductor wafer and the ions are directed towards a surface of a semiconductor wafer. The ions combine with static charges on the semiconductor wafer to thereby discharge the surface of the semiconductor wafer.

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