Apparatus for washing semiconductor materials

Details Apparatus for washing semiconductor materials Apparatus for washing semiconductor materials

1981-01-02

1982-11-30

Bleutge, Robert L.

Cleaning and liquid contact with solids

Apparatus

With spray or jet supplying and/or applying means

134164, B08B 302

Patent

active

043611630

ABSTRACT:
An improved apparatus for washing semiconductor materials is provided, which comprises any type of washing container in which a predetermined number of semiconductor materials held in a carrier are washed with pure water, and one or a plurality of shower devices mounted above said washing container to thereby wash the semiconductor materials held in a carrier with new pure water when the semiconductor materials are being lifted up.

REFERENCES:
patent: 2596653 (1952-05-01), Clague et al.
patent: 3215152 (1965-11-01), Beerli
patent: 3893869 (1975-07-01), Mayer et al.
patent: 4092176 (1978-05-01), Kozai et al.
patent: 4295730 (1981-10-01), Fraser

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