Apparatus for washing opposite surfaces of a substrate

Details Apparatus for washing opposite surfaces of a substrate Apparatus for washing opposite surfaces of a substrate

1987-11-17

1989-03-14

Roberts, Edward L.

Brushing, scrubbing, and general cleaning

Machines

Wiping

15102, B08B 01, G03F 01

Patent

active

048114430

ABSTRACT:
An apparatus for washing and wiping both surfaces of a substrate includes a pair of juxtaposed cleaning disks of a porous elastic material with a disk-shaped wiping member on each disk. A substrate requiring cleaning is inserted between the disks and one of the disks is rotated to produce relative rotation which is effective for cleaning/wiping the substrate. A cleaning-liquid supply alternately supplies a cleaning liquid to one and then to the other of the substrate to sequentially wash the opposite surfaces of the substrate. While one of its sides is being washed, the other side of the substrate, which is not being supplied with the cleaning liquid, is drawn against the other disk by suction pressure or the like.

REFERENCES:
patent: 4109337 (1978-08-01), Hillman et al.

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