Apparatus for visual inspection

Details Apparatus for visual inspection Apparatus for visual inspection

2005-11-01

2010-10-26

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

Having polarization

C356S237200

Reexamination Certificate

active

07821644

ABSTRACT:
An apparatus is provided which reduces the dependency of the direction of polarization on channels of an image sensor so as to improve the sensitivity of inspection. In the apparatus, the direction of an illumination beam incident on a polarizing beam splitter is made to be substantially parallel to the longitudinal direction of a field of view of an image sensor projected on the polarizing beam splitter.

REFERENCES:
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patent: 2004/0115843 (2004-06-01), Wack et al.
patent: 2004/0150821 (2004-08-01), Shibata et al.
patent: 2006/0082781 (2006-04-01), Chan et al.
patent: 61-104243 (1986-05-01), None
patent: 2000-155099 (2000-06-01), None
patent: 2002-039960 (2002-02-01), None
patent: 2003-344306 (2003-12-01), None
Japanese Office Action, w/ English translation thereof, issued in Japanese Patent Application No. JP 2004-320771 drafted Nov. 16, 2009.

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